12/2/2010	3:16:34 PM	Helium MFC set to  100.000000
12/2/2010	3:16:43 PM	Helium valve opened
12/2/2010	3:16:52 PM	Helium valve closed
12/2/2010	3:17:41 PM	Bypass valve closed
12/2/2010	3:17:41 PM	Main Vac valve closed
12/2/2010	3:17:48 PM	Main Vac valve opened
12/2/2010	3:17:49 PM	Bypass valve opened
12/2/2010	3:18:06 PM	Tube furnace set to 100
12/2/2010	3:18:17 PM	Tube furnace set to 0
12/2/2010	3:18:47 PM	Helium valve opened
12/2/2010	3:19:06 PM	Helium valve closed
12/2/2010	3:19:09 PM	Helium MFC set to  0.000000
12/2/2010	3:20:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2010	3:20:11 PM	Recipe started at 3:20 PM
12/2/2010	3:20:11 PM	H2 valve closed
12/2/2010	3:20:11 PM	BCl3 valve closed
12/2/2010	3:20:11 PM	PH3 valve closed
12/2/2010	3:20:11 PM	SiCl4 pre valve closed
12/2/2010	3:20:11 PM	SiCl4 post valve closed
12/2/2010	3:20:11 PM	Main Vac valve closed
12/2/2010	3:20:11 PM	Bypass valve closed
12/2/2010	3:20:11 PM	Bubbler valve closed
12/2/2010	3:20:11 PM	Helium valve opened
12/2/2010	3:20:11 PM	Helium MFC set to  500.000000
12/2/2010	3:20:11 PM	H2 MFC set to  0.000000
12/2/2010	3:20:11 PM	BCl3 MFC set to  0.000000
12/2/2010	3:20:11 PM	PHl3 MFC set to  0.000000
12/2/2010	3:20:11 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:20:11 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:20:11 PM	Tube furnace set to 0
12/2/2010	3:21:32 PM	Helium valve closed
12/2/2010	3:21:32 PM	H2 valve closed
12/2/2010	3:21:32 PM	BCl3 valve closed
12/2/2010	3:21:32 PM	PH3 valve closed
12/2/2010	3:21:32 PM	SiCl4 pre valve closed
12/2/2010	3:21:32 PM	SiCl4 post valve closed
12/2/2010	3:21:32 PM	Main Vac valve closed
12/2/2010	3:21:32 PM	Bypass valve closed
12/2/2010	3:21:32 PM	Bubbler valve closed
12/2/2010	3:21:32 PM	Helium MFC set to  0.000000
12/2/2010	3:21:32 PM	H2 MFC set to  0.000000
12/2/2010	3:21:32 PM	BCl3 MFC set to  0.000000
12/2/2010	3:21:32 PM	PHl3 MFC set to  0.000000
12/2/2010	3:21:32 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:21:32 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:21:32 PM	Tube furnace set to 0
12/2/2010	3:21:32 PM	Run finished at 3:21 PM
12/2/2010	3:21:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/2/2010	3:48:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2010	3:48:40 PM	Recipe started at 3:48 PM
12/2/2010	3:48:40 PM	Helium valve closed
12/2/2010	3:48:40 PM	H2 valve closed
12/2/2010	3:48:40 PM	BCl3 valve closed
12/2/2010	3:48:40 PM	PH3 valve closed
12/2/2010	3:48:40 PM	SiCl4 pre valve closed
12/2/2010	3:48:40 PM	SiCl4 post valve closed
12/2/2010	3:48:40 PM	Main Vac valve closed
12/2/2010	3:48:40 PM	Bubbler valve closed
12/2/2010	3:48:40 PM	Bypass valve opened
12/2/2010	3:48:40 PM	Helium MFC set to  0.000000
12/2/2010	3:48:40 PM	H2 MFC set to  0.000000
12/2/2010	3:48:40 PM	BCl3 MFC set to  0.000000
12/2/2010	3:48:40 PM	PHl3 MFC set to  0.000000
12/2/2010	3:48:40 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:48:40 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:48:40 PM	Tube furnace set to 0
12/2/2010	3:49:20 PM	Run aborted at 3:49 PM
12/2/2010	3:49:20 PM	Helium valve closed
12/2/2010	3:49:20 PM	H2 valve closed
12/2/2010	3:49:20 PM	BCl3 valve closed
12/2/2010	3:49:20 PM	PH3 valve closed
12/2/2010	3:49:20 PM	SiCl4 pre valve closed
12/2/2010	3:49:20 PM	SiCl4 post valve closed
12/2/2010	3:49:20 PM	Bypass valve closed
12/2/2010	3:49:20 PM	Main Vac valve closed
12/2/2010	3:49:20 PM	Bubbler valve closed
12/2/2010	3:49:20 PM	Helium MFC set to  0.000000
12/2/2010	3:49:20 PM	H2 MFC set to  0.000000
12/2/2010	3:49:20 PM	BCl3 MFC set to  0.000000
12/2/2010	3:49:20 PM	PHl3 MFC set to  0.000000
12/2/2010	3:49:20 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:49:20 PM	Tube furnace set to 0
12/2/2010	3:49:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2010	3:51:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2010	3:51:01 PM	Recipe started at 3:51 PM
12/2/2010	3:51:01 PM	Helium valve closed
12/2/2010	3:51:01 PM	H2 valve closed
12/2/2010	3:51:01 PM	BCl3 valve closed
12/2/2010	3:51:01 PM	PH3 valve closed
12/2/2010	3:51:01 PM	SiCl4 pre valve closed
12/2/2010	3:51:01 PM	SiCl4 post valve closed
12/2/2010	3:51:01 PM	Main Vac valve closed
12/2/2010	3:51:01 PM	Bubbler valve closed
12/2/2010	3:51:01 PM	Bypass valve opened
12/2/2010	3:51:01 PM	Helium MFC set to  0.000000
12/2/2010	3:51:01 PM	H2 MFC set to  0.000000
12/2/2010	3:51:01 PM	BCl3 MFC set to  0.000000
12/2/2010	3:51:01 PM	PHl3 MFC set to  0.000000
12/2/2010	3:51:01 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:51:01 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:51:02 PM	Tube furnace set to 0
12/2/2010	3:52:01 PM	Helium valve closed
12/2/2010	3:52:01 PM	H2 valve closed
12/2/2010	3:52:01 PM	BCl3 valve closed
12/2/2010	3:52:01 PM	PH3 valve closed
12/2/2010	3:52:01 PM	SiCl4 pre valve closed
12/2/2010	3:52:01 PM	SiCl4 post valve closed
12/2/2010	3:52:01 PM	Bubbler valve closed
12/2/2010	3:52:01 PM	Main Vac valve opened
12/2/2010	3:52:01 PM	Bypass valve opened
12/2/2010	3:52:01 PM	Helium MFC set to  0.000000
12/2/2010	3:52:01 PM	H2 MFC set to  0.000000
12/2/2010	3:52:01 PM	BCl3 MFC set to  0.000000
12/2/2010	3:52:01 PM	PHl3 MFC set to  0.000000
12/2/2010	3:52:01 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:52:01 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:52:01 PM	Tube furnace set to 0
12/2/2010	3:52:01 PM	Run finished at 3:52 PM
12/2/2010	3:52:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2010	3:53:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/2/2010	3:53:26 PM	Recipe started at 3:53 PM
12/2/2010	3:53:26 PM	Helium valve closed
12/2/2010	3:53:26 PM	H2 valve closed
12/2/2010	3:53:26 PM	BCl3 valve closed
12/2/2010	3:53:26 PM	PH3 valve closed
12/2/2010	3:53:26 PM	SiCl4 pre valve closed
12/2/2010	3:53:26 PM	SiCl4 post valve closed
12/2/2010	3:53:26 PM	Main Vac valve closed
12/2/2010	3:53:26 PM	Bubbler valve closed
12/2/2010	3:53:26 PM	Bypass valve opened
12/2/2010	3:53:26 PM	Helium MFC set to  0.000000
12/2/2010	3:53:26 PM	H2 MFC set to  0.000000
12/2/2010	3:53:26 PM	BCl3 MFC set to  0.000000
12/2/2010	3:53:26 PM	PHl3 MFC set to  0.000000
12/2/2010	3:53:26 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:53:26 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:53:26 PM	Tube furnace set to 0
12/2/2010	3:53:27 PM	Helium valve closed
12/2/2010	3:53:27 PM	H2 valve closed
12/2/2010	3:53:27 PM	BCl3 valve closed
12/2/2010	3:53:27 PM	PH3 valve closed
12/2/2010	3:53:27 PM	SiCl4 pre valve closed
12/2/2010	3:53:27 PM	SiCl4 post valve closed
12/2/2010	3:53:27 PM	Bubbler valve closed
12/2/2010	3:53:27 PM	Main Vac valve opened
12/2/2010	3:53:27 PM	Bypass valve opened
12/2/2010	3:53:27 PM	Helium MFC set to  0.000000
12/2/2010	3:53:27 PM	H2 MFC set to  0.000000
12/2/2010	3:53:27 PM	BCl3 MFC set to  0.000000
12/2/2010	3:53:27 PM	PHl3 MFC set to  0.000000
12/2/2010	3:53:27 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:53:27 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:53:27 PM	Tube furnace set to 0
12/2/2010	3:54:27 PM	H2 valve closed
12/2/2010	3:54:27 PM	BCl3 valve closed
12/2/2010	3:54:27 PM	PH3 valve closed
12/2/2010	3:54:27 PM	SiCl4 pre valve closed
12/2/2010	3:54:27 PM	SiCl4 post valve closed
12/2/2010	3:54:27 PM	Bubbler valve closed
12/2/2010	3:54:27 PM	Helium valve opened
12/2/2010	3:54:27 PM	Main Vac valve opened
12/2/2010	3:54:27 PM	Bypass valve opened
12/2/2010	3:54:27 PM	Helium MFC set to  100.000000
12/2/2010	3:54:27 PM	H2 MFC set to  0.000000
12/2/2010	3:54:27 PM	BCl3 MFC set to  0.000000
12/2/2010	3:54:27 PM	PHl3 MFC set to  0.000000
12/2/2010	3:54:27 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:54:27 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:54:27 PM	Tube furnace set to 0
12/2/2010	3:55:06 PM	Run aborted at 3:55 PM
12/2/2010	3:55:06 PM	Helium valve closed
12/2/2010	3:55:06 PM	H2 valve closed
12/2/2010	3:55:06 PM	BCl3 valve closed
12/2/2010	3:55:06 PM	PH3 valve closed
12/2/2010	3:55:06 PM	SiCl4 pre valve closed
12/2/2010	3:55:06 PM	SiCl4 post valve closed
12/2/2010	3:55:06 PM	Bypass valve closed
12/2/2010	3:55:06 PM	Main Vac valve closed
12/2/2010	3:55:06 PM	Bubbler valve closed
12/2/2010	3:55:06 PM	Helium MFC set to  0.000000
12/2/2010	3:55:06 PM	H2 MFC set to  0.000000
12/2/2010	3:55:06 PM	BCl3 MFC set to  0.000000
12/2/2010	3:55:06 PM	PHl3 MFC set to  0.000000
12/2/2010	3:55:06 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:55:06 PM	Tube furnace set to 0
12/2/2010	3:55:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/2/2010	3:55:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2010	3:55:10 PM	Recipe started at 3:55 PM
12/2/2010	3:55:10 PM	Helium valve closed
12/2/2010	3:55:10 PM	H2 valve closed
12/2/2010	3:55:10 PM	BCl3 valve closed
12/2/2010	3:55:10 PM	PH3 valve closed
12/2/2010	3:55:10 PM	SiCl4 pre valve closed
12/2/2010	3:55:10 PM	SiCl4 post valve closed
12/2/2010	3:55:10 PM	Main Vac valve closed
12/2/2010	3:55:10 PM	Bubbler valve closed
12/2/2010	3:55:10 PM	Bypass valve opened
12/2/2010	3:55:10 PM	Helium MFC set to  0.000000
12/2/2010	3:55:10 PM	H2 MFC set to  0.000000
12/2/2010	3:55:10 PM	BCl3 MFC set to  0.000000
12/2/2010	3:55:10 PM	PHl3 MFC set to  0.000000
12/2/2010	3:55:10 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:55:10 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:55:10 PM	Tube furnace set to 0
12/2/2010	3:55:10 PM	Helium valve closed
12/2/2010	3:55:10 PM	H2 valve closed
12/2/2010	3:55:10 PM	BCl3 valve closed
12/2/2010	3:55:10 PM	PH3 valve closed
12/2/2010	3:55:10 PM	SiCl4 pre valve closed
12/2/2010	3:55:10 PM	SiCl4 post valve closed
12/2/2010	3:55:10 PM	Bubbler valve closed
12/2/2010	3:55:10 PM	Main Vac valve opened
12/2/2010	3:55:10 PM	Bypass valve opened
12/2/2010	3:55:10 PM	Helium MFC set to  0.000000
12/2/2010	3:55:10 PM	H2 MFC set to  0.000000
12/2/2010	3:55:10 PM	BCl3 MFC set to  0.000000
12/2/2010	3:55:10 PM	PHl3 MFC set to  0.000000
12/2/2010	3:55:10 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:55:10 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:55:10 PM	Tube furnace set to 0
12/2/2010	3:55:11 PM	Run finished at 3:55 PM
12/2/2010	3:55:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2010	3:59:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/2/2010	3:59:59 PM	Recipe started at 3:59 PM
12/2/2010	3:59:59 PM	Helium valve closed
12/2/2010	3:59:59 PM	H2 valve closed
12/2/2010	3:59:59 PM	BCl3 valve closed
12/2/2010	3:59:59 PM	PH3 valve closed
12/2/2010	3:59:59 PM	SiCl4 pre valve closed
12/2/2010	3:59:59 PM	SiCl4 post valve closed
12/2/2010	3:59:59 PM	Main Vac valve closed
12/2/2010	3:59:59 PM	Bubbler valve closed
12/2/2010	3:59:59 PM	Bypass valve opened
12/2/2010	3:59:59 PM	Helium MFC set to  0.000000
12/2/2010	3:59:59 PM	H2 MFC set to  0.000000
12/2/2010	3:59:59 PM	BCl3 MFC set to  0.000000
12/2/2010	3:59:59 PM	PHl3 MFC set to  0.000000
12/2/2010	3:59:59 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:59:59 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	3:59:59 PM	Tube furnace set to 0
12/2/2010	3:59:59 PM	Helium valve closed
12/2/2010	3:59:59 PM	H2 valve closed
12/2/2010	3:59:59 PM	BCl3 valve closed
12/2/2010	3:59:59 PM	PH3 valve closed
12/2/2010	3:59:59 PM	SiCl4 pre valve closed
12/2/2010	3:59:59 PM	SiCl4 post valve closed
12/2/2010	3:59:59 PM	Bubbler valve closed
12/2/2010	3:59:59 PM	Main Vac valve opened
12/2/2010	3:59:59 PM	Bypass valve opened
12/2/2010	3:59:59 PM	Helium MFC set to  0.000000
12/2/2010	3:59:59 PM	H2 MFC set to  0.000000
12/2/2010	3:59:59 PM	BCl3 MFC set to  0.000000
12/2/2010	3:59:59 PM	PHl3 MFC set to  0.000000
12/2/2010	3:59:59 PM	SiCl4 MFC set to  0.000000
12/2/2010	3:59:59 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:00:00 PM	Tube furnace set to 0
12/2/2010	4:01:00 PM	H2 valve closed
12/2/2010	4:01:00 PM	BCl3 valve closed
12/2/2010	4:01:00 PM	PH3 valve closed
12/2/2010	4:01:00 PM	SiCl4 pre valve closed
12/2/2010	4:01:00 PM	SiCl4 post valve closed
12/2/2010	4:01:00 PM	Bubbler valve closed
12/2/2010	4:01:00 PM	Helium valve opened
12/2/2010	4:01:00 PM	Main Vac valve opened
12/2/2010	4:01:00 PM	Bypass valve opened
12/2/2010	4:01:00 PM	Helium MFC set to  100.000000
12/2/2010	4:01:00 PM	H2 MFC set to  0.000000
12/2/2010	4:01:00 PM	BCl3 MFC set to  0.000000
12/2/2010	4:01:00 PM	PHl3 MFC set to  0.000000
12/2/2010	4:01:00 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:01:00 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:01:00 PM	Tube furnace set to 0
12/2/2010	4:02:00 PM	Helium valve closed
12/2/2010	4:02:00 PM	H2 valve closed
12/2/2010	4:02:00 PM	BCl3 valve closed
12/2/2010	4:02:00 PM	PH3 valve closed
12/2/2010	4:02:00 PM	SiCl4 pre valve closed
12/2/2010	4:02:00 PM	SiCl4 post valve closed
12/2/2010	4:02:00 PM	Bubbler valve closed
12/2/2010	4:02:00 PM	Main Vac valve opened
12/2/2010	4:02:00 PM	Bypass valve opened
12/2/2010	4:02:00 PM	Helium MFC set to  0.000000
12/2/2010	4:02:00 PM	H2 MFC set to  0.000000
12/2/2010	4:02:00 PM	BCl3 MFC set to  0.000000
12/2/2010	4:02:00 PM	PHl3 MFC set to  0.000000
12/2/2010	4:02:00 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:02:00 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:02:00 PM	Tube furnace set to 0
12/2/2010	4:03:00 PM	H2 valve closed
12/2/2010	4:03:00 PM	BCl3 valve closed
12/2/2010	4:03:00 PM	PH3 valve closed
12/2/2010	4:03:00 PM	SiCl4 pre valve closed
12/2/2010	4:03:00 PM	SiCl4 post valve closed
12/2/2010	4:03:00 PM	Bubbler valve closed
12/2/2010	4:03:00 PM	Helium valve opened
12/2/2010	4:03:00 PM	Main Vac valve opened
12/2/2010	4:03:00 PM	Bypass valve opened
12/2/2010	4:03:00 PM	Helium MFC set to  100.000000
12/2/2010	4:03:00 PM	H2 MFC set to  0.000000
12/2/2010	4:03:00 PM	BCl3 MFC set to  0.000000
12/2/2010	4:03:00 PM	PHl3 MFC set to  0.000000
12/2/2010	4:03:00 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:03:00 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:03:00 PM	Tube furnace set to 0
12/2/2010	4:04:00 PM	Helium valve closed
12/2/2010	4:04:00 PM	H2 valve closed
12/2/2010	4:04:00 PM	BCl3 valve closed
12/2/2010	4:04:00 PM	PH3 valve closed
12/2/2010	4:04:00 PM	SiCl4 pre valve closed
12/2/2010	4:04:00 PM	SiCl4 post valve closed
12/2/2010	4:04:00 PM	Bubbler valve closed
12/2/2010	4:04:00 PM	Main Vac valve opened
12/2/2010	4:04:00 PM	Bypass valve opened
12/2/2010	4:04:00 PM	Helium MFC set to  0.000000
12/2/2010	4:04:00 PM	H2 MFC set to  0.000000
12/2/2010	4:04:00 PM	BCl3 MFC set to  0.000000
12/2/2010	4:04:00 PM	PHl3 MFC set to  0.000000
12/2/2010	4:04:00 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:04:00 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:04:00 PM	Tube furnace set to 0
12/2/2010	4:05:00 PM	H2 valve closed
12/2/2010	4:05:00 PM	BCl3 valve closed
12/2/2010	4:05:00 PM	PH3 valve closed
12/2/2010	4:05:00 PM	SiCl4 pre valve closed
12/2/2010	4:05:00 PM	SiCl4 post valve closed
12/2/2010	4:05:00 PM	Bubbler valve closed
12/2/2010	4:05:00 PM	Helium valve opened
12/2/2010	4:05:00 PM	Main Vac valve opened
12/2/2010	4:05:00 PM	Bypass valve opened
12/2/2010	4:05:00 PM	Helium MFC set to  100.000000
12/2/2010	4:05:00 PM	H2 MFC set to  0.000000
12/2/2010	4:05:00 PM	BCl3 MFC set to  0.000000
12/2/2010	4:05:00 PM	PHl3 MFC set to  0.000000
12/2/2010	4:05:00 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:05:00 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:05:01 PM	Tube furnace set to 0
12/2/2010	4:06:01 PM	Helium valve closed
12/2/2010	4:06:01 PM	H2 valve closed
12/2/2010	4:06:01 PM	BCl3 valve closed
12/2/2010	4:06:01 PM	PH3 valve closed
12/2/2010	4:06:01 PM	SiCl4 pre valve closed
12/2/2010	4:06:01 PM	SiCl4 post valve closed
12/2/2010	4:06:01 PM	Bubbler valve closed
12/2/2010	4:06:01 PM	Main Vac valve opened
12/2/2010	4:06:01 PM	Bypass valve opened
12/2/2010	4:06:01 PM	Helium MFC set to  0.000000
12/2/2010	4:06:01 PM	H2 MFC set to  0.000000
12/2/2010	4:06:01 PM	BCl3 MFC set to  0.000000
12/2/2010	4:06:01 PM	PHl3 MFC set to  0.000000
12/2/2010	4:06:01 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:06:01 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:06:01 PM	Tube furnace set to 0
12/2/2010	4:07:01 PM	H2 valve closed
12/2/2010	4:07:01 PM	BCl3 valve closed
12/2/2010	4:07:01 PM	PH3 valve closed
12/2/2010	4:07:01 PM	SiCl4 pre valve closed
12/2/2010	4:07:01 PM	SiCl4 post valve closed
12/2/2010	4:07:01 PM	Bubbler valve closed
12/2/2010	4:07:01 PM	Helium valve opened
12/2/2010	4:07:01 PM	Main Vac valve opened
12/2/2010	4:07:01 PM	Bypass valve opened
12/2/2010	4:07:01 PM	Helium MFC set to  100.000000
12/2/2010	4:07:01 PM	H2 MFC set to  0.000000
12/2/2010	4:07:01 PM	BCl3 MFC set to  0.000000
12/2/2010	4:07:01 PM	PHl3 MFC set to  0.000000
12/2/2010	4:07:01 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:07:01 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:07:01 PM	Tube furnace set to 0
12/2/2010	4:08:01 PM	Helium valve closed
12/2/2010	4:08:01 PM	H2 valve closed
12/2/2010	4:08:01 PM	BCl3 valve closed
12/2/2010	4:08:01 PM	PH3 valve closed
12/2/2010	4:08:01 PM	SiCl4 pre valve closed
12/2/2010	4:08:01 PM	SiCl4 post valve closed
12/2/2010	4:08:01 PM	Bubbler valve closed
12/2/2010	4:08:01 PM	Main Vac valve opened
12/2/2010	4:08:01 PM	Bypass valve opened
12/2/2010	4:08:01 PM	Helium MFC set to  0.000000
12/2/2010	4:08:01 PM	H2 MFC set to  0.000000
12/2/2010	4:08:01 PM	BCl3 MFC set to  0.000000
12/2/2010	4:08:01 PM	PHl3 MFC set to  0.000000
12/2/2010	4:08:01 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:08:01 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:08:01 PM	Tube furnace set to 0
12/2/2010	4:09:01 PM	H2 valve closed
12/2/2010	4:09:01 PM	BCl3 valve closed
12/2/2010	4:09:01 PM	PH3 valve closed
12/2/2010	4:09:01 PM	SiCl4 pre valve closed
12/2/2010	4:09:01 PM	SiCl4 post valve closed
12/2/2010	4:09:01 PM	Bubbler valve closed
12/2/2010	4:09:01 PM	Helium valve opened
12/2/2010	4:09:01 PM	Main Vac valve opened
12/2/2010	4:09:01 PM	Bypass valve opened
12/2/2010	4:09:01 PM	Helium MFC set to  100.000000
12/2/2010	4:09:01 PM	H2 MFC set to  0.000000
12/2/2010	4:09:01 PM	BCl3 MFC set to  0.000000
12/2/2010	4:09:01 PM	PHl3 MFC set to  0.000000
12/2/2010	4:09:01 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:09:01 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:09:01 PM	Tube furnace set to 0
12/2/2010	4:10:01 PM	Helium valve closed
12/2/2010	4:10:01 PM	H2 valve closed
12/2/2010	4:10:01 PM	BCl3 valve closed
12/2/2010	4:10:01 PM	PH3 valve closed
12/2/2010	4:10:01 PM	SiCl4 pre valve closed
12/2/2010	4:10:01 PM	SiCl4 post valve closed
12/2/2010	4:10:01 PM	Bubbler valve closed
12/2/2010	4:10:01 PM	Main Vac valve opened
12/2/2010	4:10:01 PM	Bypass valve opened
12/2/2010	4:10:01 PM	Helium MFC set to  0.000000
12/2/2010	4:10:01 PM	H2 MFC set to  0.000000
12/2/2010	4:10:01 PM	BCl3 MFC set to  0.000000
12/2/2010	4:10:01 PM	PHl3 MFC set to  0.000000
12/2/2010	4:10:01 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:10:01 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:10:02 PM	Tube furnace set to 0
12/2/2010	4:11:02 PM	H2 valve closed
12/2/2010	4:11:02 PM	BCl3 valve closed
12/2/2010	4:11:02 PM	PH3 valve closed
12/2/2010	4:11:02 PM	SiCl4 pre valve closed
12/2/2010	4:11:02 PM	SiCl4 post valve closed
12/2/2010	4:11:02 PM	Bubbler valve closed
12/2/2010	4:11:02 PM	Helium valve opened
12/2/2010	4:11:02 PM	Main Vac valve opened
12/2/2010	4:11:02 PM	Bypass valve opened
12/2/2010	4:11:02 PM	Helium MFC set to  100.000000
12/2/2010	4:11:02 PM	H2 MFC set to  0.000000
12/2/2010	4:11:02 PM	BCl3 MFC set to  0.000000
12/2/2010	4:11:02 PM	PHl3 MFC set to  0.000000
12/2/2010	4:11:02 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:11:02 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:11:02 PM	Tube furnace set to 0
12/2/2010	4:12:02 PM	Helium valve closed
12/2/2010	4:12:02 PM	H2 valve closed
12/2/2010	4:12:02 PM	BCl3 valve closed
12/2/2010	4:12:02 PM	PH3 valve closed
12/2/2010	4:12:02 PM	SiCl4 pre valve closed
12/2/2010	4:12:02 PM	SiCl4 post valve closed
12/2/2010	4:12:02 PM	Bubbler valve closed
12/2/2010	4:12:02 PM	Main Vac valve opened
12/2/2010	4:12:02 PM	Bypass valve opened
12/2/2010	4:12:02 PM	Helium MFC set to  0.000000
12/2/2010	4:12:02 PM	H2 MFC set to  0.000000
12/2/2010	4:12:02 PM	BCl3 MFC set to  0.000000
12/2/2010	4:12:02 PM	PHl3 MFC set to  0.000000
12/2/2010	4:12:02 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:12:02 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:12:02 PM	Tube furnace set to 0
12/2/2010	4:13:02 PM	H2 valve closed
12/2/2010	4:13:02 PM	BCl3 valve closed
12/2/2010	4:13:02 PM	PH3 valve closed
12/2/2010	4:13:02 PM	SiCl4 pre valve closed
12/2/2010	4:13:02 PM	SiCl4 post valve closed
12/2/2010	4:13:02 PM	Bubbler valve closed
12/2/2010	4:13:02 PM	Helium valve opened
12/2/2010	4:13:02 PM	Main Vac valve opened
12/2/2010	4:13:02 PM	Bypass valve opened
12/2/2010	4:13:02 PM	Helium MFC set to  100.000000
12/2/2010	4:13:02 PM	H2 MFC set to  0.000000
12/2/2010	4:13:02 PM	BCl3 MFC set to  0.000000
12/2/2010	4:13:02 PM	PHl3 MFC set to  0.000000
12/2/2010	4:13:02 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:13:02 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:13:02 PM	Tube furnace set to 0
12/2/2010	4:14:02 PM	Helium valve closed
12/2/2010	4:14:02 PM	H2 valve closed
12/2/2010	4:14:02 PM	BCl3 valve closed
12/2/2010	4:14:02 PM	PH3 valve closed
12/2/2010	4:14:02 PM	SiCl4 pre valve closed
12/2/2010	4:14:02 PM	SiCl4 post valve closed
12/2/2010	4:14:02 PM	Bubbler valve closed
12/2/2010	4:14:02 PM	Main Vac valve opened
12/2/2010	4:14:02 PM	Bypass valve opened
12/2/2010	4:14:02 PM	Helium MFC set to  0.000000
12/2/2010	4:14:02 PM	H2 MFC set to  0.000000
12/2/2010	4:14:02 PM	BCl3 MFC set to  0.000000
12/2/2010	4:14:02 PM	PHl3 MFC set to  0.000000
12/2/2010	4:14:02 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:14:02 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:14:02 PM	Tube furnace set to 0
12/2/2010	4:15:02 PM	H2 valve closed
12/2/2010	4:15:02 PM	BCl3 valve closed
12/2/2010	4:15:02 PM	PH3 valve closed
12/2/2010	4:15:02 PM	SiCl4 pre valve closed
12/2/2010	4:15:02 PM	SiCl4 post valve closed
12/2/2010	4:15:02 PM	Bubbler valve closed
12/2/2010	4:15:02 PM	Helium valve opened
12/2/2010	4:15:02 PM	Main Vac valve opened
12/2/2010	4:15:02 PM	Bypass valve opened
12/2/2010	4:15:02 PM	Helium MFC set to  100.000000
12/2/2010	4:15:02 PM	H2 MFC set to  0.000000
12/2/2010	4:15:02 PM	BCl3 MFC set to  0.000000
12/2/2010	4:15:02 PM	PHl3 MFC set to  0.000000
12/2/2010	4:15:02 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:15:02 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:15:03 PM	Tube furnace set to 0
12/2/2010	4:16:03 PM	Helium valve closed
12/2/2010	4:16:03 PM	H2 valve closed
12/2/2010	4:16:03 PM	BCl3 valve closed
12/2/2010	4:16:03 PM	PH3 valve closed
12/2/2010	4:16:03 PM	SiCl4 pre valve closed
12/2/2010	4:16:03 PM	SiCl4 post valve closed
12/2/2010	4:16:03 PM	Bubbler valve closed
12/2/2010	4:16:03 PM	Main Vac valve opened
12/2/2010	4:16:03 PM	Bypass valve opened
12/2/2010	4:16:03 PM	Helium MFC set to  0.000000
12/2/2010	4:16:03 PM	H2 MFC set to  0.000000
12/2/2010	4:16:03 PM	BCl3 MFC set to  0.000000
12/2/2010	4:16:03 PM	PHl3 MFC set to  0.000000
12/2/2010	4:16:03 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:16:03 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:16:03 PM	Tube furnace set to 0
12/2/2010	4:17:03 PM	H2 valve closed
12/2/2010	4:17:03 PM	BCl3 valve closed
12/2/2010	4:17:03 PM	PH3 valve closed
12/2/2010	4:17:03 PM	SiCl4 pre valve closed
12/2/2010	4:17:03 PM	SiCl4 post valve closed
12/2/2010	4:17:03 PM	Bubbler valve closed
12/2/2010	4:17:03 PM	Helium valve opened
12/2/2010	4:17:03 PM	Main Vac valve opened
12/2/2010	4:17:03 PM	Bypass valve opened
12/2/2010	4:17:03 PM	Helium MFC set to  100.000000
12/2/2010	4:17:03 PM	H2 MFC set to  0.000000
12/2/2010	4:17:03 PM	BCl3 MFC set to  0.000000
12/2/2010	4:17:03 PM	PHl3 MFC set to  0.000000
12/2/2010	4:17:03 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:17:03 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:17:03 PM	Tube furnace set to 0
12/2/2010	4:18:03 PM	Helium valve closed
12/2/2010	4:18:03 PM	H2 valve closed
12/2/2010	4:18:03 PM	BCl3 valve closed
12/2/2010	4:18:03 PM	PH3 valve closed
12/2/2010	4:18:03 PM	SiCl4 pre valve closed
12/2/2010	4:18:03 PM	SiCl4 post valve closed
12/2/2010	4:18:03 PM	Bubbler valve closed
12/2/2010	4:18:03 PM	Main Vac valve opened
12/2/2010	4:18:03 PM	Bypass valve opened
12/2/2010	4:18:03 PM	Helium MFC set to  0.000000
12/2/2010	4:18:03 PM	H2 MFC set to  0.000000
12/2/2010	4:18:03 PM	BCl3 MFC set to  0.000000
12/2/2010	4:18:03 PM	PHl3 MFC set to  0.000000
12/2/2010	4:18:03 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:18:03 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:18:03 PM	Tube furnace set to 0
12/2/2010	4:19:03 PM	H2 valve closed
12/2/2010	4:19:03 PM	BCl3 valve closed
12/2/2010	4:19:03 PM	PH3 valve closed
12/2/2010	4:19:03 PM	SiCl4 pre valve closed
12/2/2010	4:19:03 PM	SiCl4 post valve closed
12/2/2010	4:19:03 PM	Bubbler valve closed
12/2/2010	4:19:03 PM	Helium valve opened
12/2/2010	4:19:03 PM	Main Vac valve opened
12/2/2010	4:19:03 PM	Bypass valve opened
12/2/2010	4:19:03 PM	Helium MFC set to  100.000000
12/2/2010	4:19:03 PM	H2 MFC set to  0.000000
12/2/2010	4:19:03 PM	BCl3 MFC set to  0.000000
12/2/2010	4:19:03 PM	PHl3 MFC set to  0.000000
12/2/2010	4:19:03 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:19:03 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:19:03 PM	Tube furnace set to 0
12/2/2010	4:20:03 PM	Helium valve closed
12/2/2010	4:20:03 PM	H2 valve closed
12/2/2010	4:20:03 PM	BCl3 valve closed
12/2/2010	4:20:03 PM	PH3 valve closed
12/2/2010	4:20:03 PM	SiCl4 pre valve closed
12/2/2010	4:20:03 PM	SiCl4 post valve closed
12/2/2010	4:20:03 PM	Bubbler valve closed
12/2/2010	4:20:03 PM	Main Vac valve opened
12/2/2010	4:20:03 PM	Bypass valve opened
12/2/2010	4:20:03 PM	Helium MFC set to  0.000000
12/2/2010	4:20:03 PM	H2 MFC set to  0.000000
12/2/2010	4:20:03 PM	BCl3 MFC set to  0.000000
12/2/2010	4:20:03 PM	PHl3 MFC set to  0.000000
12/2/2010	4:20:03 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:20:03 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:20:04 PM	Tube furnace set to 0
12/2/2010	4:20:05 PM	Run finished at 4:20 PM
12/2/2010	4:20:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/2/2010	4:33:15 PM	Recipe started at 4:33 PM
12/2/2010	4:33:15 PM	Helium valve closed
12/2/2010	4:33:15 PM	BCl3 valve closed
12/2/2010	4:33:15 PM	PH3 valve closed
12/2/2010	4:33:15 PM	SiCl4 pre valve closed
12/2/2010	4:33:15 PM	SiCl4 post valve closed
12/2/2010	4:33:15 PM	Main Vac valve closed
12/2/2010	4:33:15 PM	Bypass valve closed
12/2/2010	4:33:15 PM	Bubbler valve closed
12/2/2010	4:33:15 PM	H2 valve opened
12/2/2010	4:33:15 PM	Helium MFC set to  0.000000
12/2/2010	4:33:15 PM	H2 MFC set to  500.000000
12/2/2010	4:33:15 PM	BCl3 MFC set to  0.000000
12/2/2010	4:33:15 PM	PHl3 MFC set to  0.000000
12/2/2010	4:33:15 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:33:15 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:33:15 PM	Tube furnace set to 100
12/2/2010	4:34:38 PM	Helium valve closed
12/2/2010	4:34:38 PM	BCl3 valve closed
12/2/2010	4:34:38 PM	PH3 valve closed
12/2/2010	4:34:38 PM	SiCl4 pre valve closed
12/2/2010	4:34:38 PM	SiCl4 post valve closed
12/2/2010	4:34:38 PM	Main Vac valve closed
12/2/2010	4:34:38 PM	Bypass valve closed
12/2/2010	4:34:38 PM	H2 valve opened
12/2/2010	4:34:38 PM	Bubbler valve opened
12/2/2010	4:34:38 PM	Helium MFC set to  0.000000
12/2/2010	4:34:38 PM	H2 MFC set to  500.000000
12/2/2010	4:34:38 PM	BCl3 MFC set to  0.000000
12/2/2010	4:34:38 PM	PHl3 MFC set to  0.000000
12/2/2010	4:34:38 PM	SiCl4 MFC set to  0.000000
12/2/2010	4:34:38 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:34:38 PM	Tube furnace set to 1000
12/2/2010	4:54:38 PM	Helium valve closed
12/2/2010	4:54:38 PM	PH3 valve closed
12/2/2010	4:54:38 PM	Main Vac valve closed
12/2/2010	4:54:38 PM	Bypass valve closed
12/2/2010	4:54:38 PM	H2 valve opened
12/2/2010	4:54:38 PM	BCl3 valve opened
12/2/2010	4:54:38 PM	SiCl4 pre valve opened
12/2/2010	4:54:38 PM	SiCl4 post valve opened
12/2/2010	4:54:38 PM	Bubbler valve opened
12/2/2010	4:54:38 PM	Helium MFC set to  0.000000
12/2/2010	4:54:38 PM	H2 MFC set to  500.000000
12/2/2010	4:54:38 PM	BCl3 MFC set to  10.000000
12/2/2010	4:54:38 PM	PHl3 MFC set to  0.000000
12/2/2010	4:54:38 PM	SiCl4 MFC set to  50.000000
12/2/2010	4:54:38 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	4:54:38 PM	Tube furnace set to 1000
12/2/2010	5:06:38 PM	H2 valve closed
12/2/2010	5:06:38 PM	BCl3 valve closed
12/2/2010	5:06:38 PM	PH3 valve closed
12/2/2010	5:06:38 PM	SiCl4 pre valve closed
12/2/2010	5:06:38 PM	SiCl4 post valve closed
12/2/2010	5:06:38 PM	Main Vac valve closed
12/2/2010	5:06:38 PM	Bypass valve closed
12/2/2010	5:06:38 PM	Helium valve opened
12/2/2010	5:06:38 PM	Bubbler valve opened
12/2/2010	5:06:38 PM	Helium MFC set to  500.000000
12/2/2010	5:06:38 PM	H2 MFC set to  0.000000
12/2/2010	5:06:38 PM	BCl3 MFC set to  0.000000
12/2/2010	5:06:38 PM	PHl3 MFC set to  0.000000
12/2/2010	5:06:38 PM	SiCl4 MFC set to  0.000000
12/2/2010	5:06:38 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	5:06:38 PM	Tube furnace set to 0
12/2/2010	5:26:38 PM	Helium valve closed
12/2/2010	5:26:38 PM	H2 valve closed
12/2/2010	5:26:38 PM	BCl3 valve closed
12/2/2010	5:26:38 PM	PH3 valve closed
12/2/2010	5:26:38 PM	SiCl4 pre valve closed
12/2/2010	5:26:38 PM	SiCl4 post valve closed
12/2/2010	5:26:38 PM	Main Vac valve closed
12/2/2010	5:26:38 PM	Bypass valve closed
12/2/2010	5:26:38 PM	Bubbler valve closed
12/2/2010	5:26:38 PM	Helium MFC set to  0.000000
12/2/2010	5:26:38 PM	H2 MFC set to  0.000000
12/2/2010	5:26:38 PM	BCl3 MFC set to  0.000000
12/2/2010	5:26:38 PM	PHl3 MFC set to  0.000000
12/2/2010	5:26:38 PM	SiCl4 MFC set to  0.000000
12/2/2010	5:26:38 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	5:26:39 PM	Tube furnace set to 0
12/2/2010	5:26:39 PM	Run finished at 5:26 PM
12/2/2010	5:57:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/2/2010	5:57:50 PM	Recipe started at 5:57 PM
12/2/2010	5:57:50 PM	Helium valve closed
12/2/2010	5:57:50 PM	H2 valve closed
12/2/2010	5:57:50 PM	BCl3 valve closed
12/2/2010	5:57:50 PM	PH3 valve closed
12/2/2010	5:57:50 PM	SiCl4 pre valve closed
12/2/2010	5:57:50 PM	SiCl4 post valve closed
12/2/2010	5:57:50 PM	Main Vac valve closed
12/2/2010	5:57:50 PM	Bubbler valve closed
12/2/2010	5:57:50 PM	Bypass valve opened
12/2/2010	5:57:50 PM	Helium MFC set to  0.000000
12/2/2010	5:57:50 PM	H2 MFC set to  0.000000
12/2/2010	5:57:50 PM	BCl3 MFC set to  0.000000
12/2/2010	5:57:50 PM	PHl3 MFC set to  0.000000
12/2/2010	5:57:50 PM	SiCl4 MFC set to  0.000000
12/2/2010	5:57:50 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	5:57:50 PM	Tube furnace set to 0
12/2/2010	5:58:44 PM	Helium valve closed
12/2/2010	5:58:44 PM	H2 valve closed
12/2/2010	5:58:44 PM	BCl3 valve closed
12/2/2010	5:58:44 PM	PH3 valve closed
12/2/2010	5:58:44 PM	SiCl4 pre valve closed
12/2/2010	5:58:44 PM	SiCl4 post valve closed
12/2/2010	5:58:44 PM	Bubbler valve closed
12/2/2010	5:58:44 PM	Main Vac valve opened
12/2/2010	5:58:44 PM	Bypass valve opened
12/2/2010	5:58:44 PM	Helium MFC set to  0.000000
12/2/2010	5:58:44 PM	H2 MFC set to  0.000000
12/2/2010	5:58:44 PM	BCl3 MFC set to  0.000000
12/2/2010	5:58:44 PM	PHl3 MFC set to  0.000000
12/2/2010	5:58:44 PM	SiCl4 MFC set to  0.000000
12/2/2010	5:58:44 PM	Bypass solenoid MFC set to  0.000000
12/2/2010	5:58:44 PM	Tube furnace set to 0
12/2/2010	5:58:44 PM	Run finished at 5:58 PM
12/2/2010	5:58:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
